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Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1

- Microlithography

Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1av P. Rai-Choudhury
Om Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1

The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. This volume contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.

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  • Språk:
  • Engelsk
  • ISBN:
  • 9780819497864
  • Bindende:
  • Paperback
  • Sider:
  • 776
  • Utgitt:
  • 30 mars 1997
  • Dimensjoner:
  • 152x229x0 mm.
  • Vekt:
  • 1380 g.
  Gratis frakt
Leveringstid: 2-4 uker
Forventet levering: 24 juli 2024

Beskrivelse av Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1

The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. This volume contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.

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