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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

Om Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.

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  • Språk:
  • Engelsk
  • ISBN:
  • 9783319762937
  • Bindende:
  • Hardback
  • Sider:
  • 138
  • Utgitt:
  • 3. april 2018
  • Utgave:
  • 12018
  • Dimensjoner:
  • 155x235x0 mm.
  • Vekt:
  • 3554 g.
  Gratis frakt
Leveringstid: 2-4 uker
Forventet levering: 20. januar 2025
Utvidet returrett til 31. januar 2025
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Beskrivelse av Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.

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