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Principles of Lithography

Om Principles of Lithography

This newest edition of Principles of Lithography reflects the continuing advancement of lithographic technology. In recent years, certain topics, such as line-edge roughness (LER), multi-electron-beam writers, have become more significant to practicing lithographers. As such extensive treatments of these topics are provided.

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  • Språk:
  • Engelsk
  • ISBN:
  • 9781510627604
  • Bindende:
  • Hardback
  • Sider:
  • 630
  • Utgitt:
  • 30 juli 2019
  • Utgave:
  • 4
  • Dimensjoner:
  • 262x185x31 mm.
  • Vekt:
  • 1422 g.
  Gratis frakt
Leveringstid: Ukjent

Beskrivelse av Principles of Lithography

This newest edition of Principles of Lithography reflects the continuing advancement of lithographic technology. In recent years, certain topics, such as line-edge roughness (LER), multi-electron-beam writers, have become more significant to practicing lithographers. As such extensive treatments of these topics are provided.

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